Materials analysis

For process-accompanying analysis and quality control in the cleanroom (ISO 14644 class 6), we use a system that effectively combines optical 3D microscopy with profile and roughness measurements as well as chemical surface analysis, i.e. laser-induced plasma spectroscopy (LIPS).

In addition, in cooperation with our partners, we carry out the following materials engineering and materials science investigations:

• Investigation of the morphology of surfaces and coatings using SEM/FIB
• TEM investigations of nanocrystalline structures using selected area electron diffraction (SAED)
• Determination of the chemical composition using EDX
• Adhesion, scratch and bending strength of coatings
• Hardness and Young’s modulus of coatings
• Electrical characterisation of functional coatings using conductivity measurements and impedance spectroscopy
• Determination of the surface energy (wettability)

3D scan: MEMS structure with H2-sensitive
functional layer, LIPS laser spots and section line for roughness measurement

SEM image: antibacterial Cu-DLC multilayer (EDX line scan on FIB cross-section)